html-Catalog Mitutoyo 2017 - 2019

MICSYS-SA1 Series 549 This high-accuracy non-contact 2D encoder uses image correlation. The MICSYS-SA1 offers you the following benefits: – Simultaneous XY position measurements. – Nanometer resolution. – Possible to measure on workpiece. – You can align it easily. – It allows you to carry out minute strain and deflection measurements.

Specifications Digital step

1 nm

Accuracy

± 100 nm

Linearity (at 20°) Working distance

80 nm

10±0,2 mm (including thickness of standard target : 6,1 mm) 650 nm (Visible) Class 2 Detector: 15 - 25°C, I/F unit: 0-40°C, 20 - 80 % RH (Non- condesing) Standard target, Sample software for data correclation (on CD-ROM) AC100-240V 45W 50/60Hz RS-232C 20Hz

Data Update Period Laser wavelength Operating temperature and humidity

Applications: - Nano positioning - Monitor performance of metrology and manufacturing frames (drift, hysteresis, repeatability) - Measure deformation

Interface

Standard accessories

Power supply

549-701D

No. 549-701D

Refer to the Micsys brochure for more details

422

All products to be sold to commercial customers. Product illustrations are without obligation. Product descriptions, in particular any and all technical specifications, are only binding when explicitly agreed upon. For suggested retail prices, please refer to the separate price list.

All products to be sold to commercial customers.